Preparation of High-barrier Polyethylene Terephthalate bottle by Microwave Plasma Enhanced Chemical Vapor Deposition

Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition

In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refra...

Nitrogen-doped graphene by microwave plasma chemical vapor deposition

Available online 6 November 2012

High Rate Deposition of Hydrogenated Amorphous Silicon Using Microwave Plasma Chemical Vapor Deposition Process

Microwave Plasma Assisted Chemical Vapor Deposition of Diamond

Diamond crystal S and p01 ycrystal l i ne diamond fi lms have been depos i e y t h e microwave plasma ass i s t ed C V D method from C H / H mixtures. The i n: :oncentration of methane, the pressure, the temperatu$e, 'the to ta l flow ra t e and the microwave power were varied in large ranges. The morphology of the deposits were s tudied by op t i ca l and scanning e l ec t ron microscopy and t...

Synthesis of high-density carbon nanotube films by microwave plasma chemical vapor deposition

Nanotubes with diameters ranging from 20 to 400 nm and densities in the range of 108 109 cm 2, produced on metal-coated Ž . Ž . silicon by microwave plasma chemical vapor deposition, show various shapes depending upon: i growth conditions; and ii preor post-growth treatment of the samples. Presence of nitrogen in the growth or pre-growth atmosphere increases the density and vertical growth rate...